Kinetic study of the oxide-assisted catalyst-free synthesis of silicon nitride nanowires

被引:12
作者
Farjas, J
Pinyol, A
Rath, C
Roura, P
Bertran, E
机构
[1] Univ Girona, Dept Phys, GRMT, Girona 17071, Catalonia, Spain
[2] AGFA Gevaert, R&D Mat, B-2640 Mortsel, Belgium
[3] Banaras Hindu Univ, Sch Mat Sci & Technol, Inst Technol, Varanasi 221005, Uttar Pradesh, India
[4] Univ Barcelona, Dept Fis Aplicada & Opt, FEMAN, E-08028 Barcelona, Catalonia, Spain
来源
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | 2006年 / 203卷 / 06期
关键词
D O I
10.1002/pssa.200566151
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The synthesis of Si3N4 nanowires from the reaction of silicon nanoparticles with N-2 in the 1200 - 1440 degrees C temperature range is reported. The nitridation conditions are such that the reaction with nitrogen is favoured by the presence of silicon oxide in the particles and by the active oxidation of silicon without a catalyst. It is shown that the Si to Si3N4 conversion rate depends on the amount of silicon particles used in the experiments and that, in general, the reaction slows down for greater amounts. This trend is explained by particle stacking, which restricts the exchange of gases between the furnace atmosphere and the atmosphere around the inner particles. In a first stage, local oxygen partial pressure increases around the inner particles and inhibits nitridation locally. If the amount of reactant Si nanoparticles is small enough, this extrinsic effect is avoided and the intrinsic nitridation kinetics can be measured. Experiments show that intrinsic kinetics does not depend on temperature.
引用
收藏
页码:1307 / 1312
页数:6
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