Negative bias temperature instability mechanism: The role of molecular hydrogen

被引：62

作者：

Krishnan, AT ^{[1
]}

Chakravarthi, S ^{[1
]}

Nicollian, P ^{[1
]}

Reddy, V ^{[1
]}

Krishnan, S ^{[1
]}

机构：

[1] Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 15期

关键词：

D O I：

10.1063/1.2191828

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The role of dimerization of atomic hydrogen to give molecular hydrogen in determining negative bias temperature instability (NBTI) kinetics is explored analytically. The time dependency of NBTI involving molecular hydrogen was found to obey a power law with a slope of 1/6, as opposed to the 1/4 slope derived for a reaction involving atomic hydrogen. The implications of this dimerization reaction for voltage and temperature acceleration are also discussed. Simulation results validating these predictions are also described. The higher slopes typically reported for NBTI are shown to be an artifact of measurement, and experimental data supporting this lower time dependency is shown. (c) 2006 American Institute of Physics.

引用

页数：3

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