Combining UV Lithography and an Imprinting Technique for Patterning Metal-Organic Frameworks

被引:97
作者
Doherty, Cara M. [1 ]
Grenci, Gianluca [2 ]
Ricco, Raffaele [1 ]
Mardel, James I. [1 ]
Reboul, Julien [3 ]
Furukawa, Shuhei [3 ]
Kitagawa, Susumu [3 ]
Hill, Anita J. [1 ]
Falcaro, Paolo [1 ]
机构
[1] CSIRO Div Mat Sci & Engn CMSE, Clayton, Vic 3169, Australia
[2] CMR IOM, Lab TASC, I-34149 Trieste, Italy
[3] Kyoto Univ, Inst Integrated Cell Mat Sci WPI iCeMS, Sakyo Ku, Kyoto 6068501, Japan
基金
澳大利亚研究理事会;
关键词
UV lithography; metal-organic frameworks; device fabrication; patterning; imprinting; THIN-FILMS; MOF; MICROFABRICATION; WATER;
D O I
10.1002/adma.201301383
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Thin metal-organic framework (MOF) films are patterned using UV lithography and an imprinting technique. A UV lithographed SU-8 film is imprinted onto a film of MOF powder forming a 2D MOF patterned film. This straightforward method can be applied to most MOF materials, is versatile, cheap, and potentially useful for commercial applications such as lab-on-a-chip type devices. Copyright © 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
引用
收藏
页码:4701 / 4705
页数:5
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