Influence of trap states on dynamic properties of single grain silicon thin film transistors

被引:17
作者
Yan, F
Migliorato, P
Ishihara, R
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[2] Delft Univ Technol, ECTM, DIMES, NL-2600 GB Delft, Netherlands
关键词
D O I
10.1063/1.2193049
中图分类号
O59 [应用物理学];
学科分类号
摘要
The transient properties of single grain-thin film transistors (SG-TFTs) with high electron mobility have been studied. Overshoot current induced by trap states has been observed in most of the devices. A method of ac measurements has been used to investigate the trap processes. Both transient and ac measurements show that the response of some SG-TFTs with high field effect mobility is dominated by a single trap level. Bias stressing on SG-TFT can induce more trap states and thus change the ac response of the device.
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页数:3
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