Topics in solid phase epitaxy: Strain, structure and geometry

被引：17

作者：

Hellman, O

机构：

[1] Tanaka Solid Junction Project/ERATO, Res. Devmt. Corporation of Japan, Kanazawa-ku, Yokohama 236

来源：

MATERIALS SCIENCE & ENGINEERING R-REPORTS | 1996年 / 16卷 / 01期

关键词：

solid phase epitaxy; strain; structure; geometry;

D O I：

10.1016/0927-796X(96)80001-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The effects of some experimental parameters on the solid-phase crystallization of amorphous films on single crystals, a process known as Solid Phase Epitaxy (SPE), are examined. Results from a large community of researchers concerning SPE of alloys and compounds, strained films, films in constrained geometries and films with unusual amorphous/crystal interfaces are reviewed. Our present understanding of mechanisms involved in SPE is given, and the implications of the wide range of experimental results are discussed.

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页码：1 / 42

页数：42

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