Topics in solid phase epitaxy: Strain, structure and geometry

被引:17
作者
Hellman, O
机构
[1] Tanaka Solid Junction Project/ERATO, Res. Devmt. Corporation of Japan, Kanazawa-ku, Yokohama 236
关键词
solid phase epitaxy; strain; structure; geometry;
D O I
10.1016/0927-796X(96)80001-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The effects of some experimental parameters on the solid-phase crystallization of amorphous films on single crystals, a process known as Solid Phase Epitaxy (SPE), are examined. Results from a large community of researchers concerning SPE of alloys and compounds, strained films, films in constrained geometries and films with unusual amorphous/crystal interfaces are reviewed. Our present understanding of mechanisms involved in SPE is given, and the implications of the wide range of experimental results are discussed.
引用
收藏
页码:1 / 42
页数:42
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