Magnetic tunnel junction device with perpendicular magnetization films for high-density magnetic random access memory

被引:378
作者
Nishimura, N [1 ]
Hirai, T [1 ]
Koganei, A [1 ]
Ikeda, T [1 ]
Okano, K [1 ]
Sekiguchi, Y [1 ]
Osada, Y [1 ]
机构
[1] Canon Inc, Semiconductor Device Dev Ctr, Ohta Ku, Tokyo 1468501, Japan
关键词
D O I
10.1063/1.1459605
中图分类号
O59 [应用物理学];
学科分类号
摘要
We present here a magnetic tunnel junction device using perpendicular magnetization films designed for magnetic random access memory (MRAM). In order to achieve high-density MRAM, magnetic tunnel junction devices with a small area of low aspect ratio (length/width) is required. However, all MRAMs reported so far consist of in-plane magnetization films, which require an aspect ratio of 2 or more in order to reduce magnetization curling at the edge. Meanwhile, a perpendicular magnetic tunnel junction (pMTJ) can achieve an aspect ratio=1 because the low saturation magnetization does not cause magnetization curling. Magnetic-force microscope shows that stable and uniform magnetization states were observed in 0.3 mumx0.3 mum perpendicular magnetization film fabricated by focused-ion beam. In contrast, in-plane magnetization films clearly show the presence of magnetization vortices at 0.5 mumx0.5 mum, which show the impossibility of information storage. The PMTJ shows a magnetoresistive (MR) ratio larger than 50% with a squareness ratio of 1 and no degradation of MR ratio at 10(3) Omega mum(2) ordered junction resistance. (C) 2002 American Institute of Physics.
引用
收藏
页码:5246 / 5249
页数:4
相关论文
共 10 条
[1]   Switching characteristics and magnetization vortices of thin-film cobalt in nanometer-scale patterned arrays [J].
Girgis, E ;
Schelten, J ;
Shi, J ;
Janesky, J ;
Tehrani, S ;
Goronkin, H .
APPLIED PHYSICS LETTERS, 2000, 76 (25) :3780-3782
[2]   Domain configurations of nanostructured Permalloy elements [J].
Gomez, RD ;
Luu, TV ;
Pak, AO ;
Kirk, KJ ;
Chapman, JN .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) :6163-6165
[3]  
Ikeda T., 2000, Journal of the Magnetics Society of Japan, V24, P563, DOI 10.3379/jmsjmag.24.563
[4]  
NAJI PK, 2001, IEEE ISSCC, V44, P122
[5]   Exchange-biased magnetic tunnel junctions and application to nonvolatile magnetic random access memory (invited) [J].
Parkin, SSP ;
Roche, KP ;
Samant, MG ;
Rice, PM ;
Beyers, RB ;
Scheuerlein, RE ;
O'Sullivan, EJ ;
Brown, SL ;
Bucchigano, J ;
Abraham, DW ;
Lu, Y ;
Rooks, M ;
Trouilloud, PL ;
Wanner, RA ;
Gallagher, WJ .
JOURNAL OF APPLIED PHYSICS, 1999, 85 (08) :5828-5833
[6]   Magnetization reversal and interlayer coupling in magnetic tunneling junctions [J].
Schrag, BD ;
Anguelouch, A ;
Xiao, G ;
Trouilloud, P ;
Lu, Y ;
Gallagher, WJ ;
Parkin, SSP .
JOURNAL OF APPLIED PHYSICS, 2000, 87 (09) :4682-4684
[7]   Geometry dependence of magnetization vortices in patterned submicron NiFe elements [J].
Shi, J ;
Tehrani, S ;
Scheinfein, MR .
APPLIED PHYSICS LETTERS, 2000, 76 (18) :2588-2590
[8]   Magnetization vortices and anomalous switching in patterned NiFeCo submicron arrays [J].
Shi, J ;
Tehrani, S ;
Zhu, T ;
Zheng, YF ;
Zhu, JG .
APPLIED PHYSICS LETTERS, 1999, 74 (17) :2525-2527
[9]   Progress and outlook for MRAM technology [J].
Tehrani, S ;
Slaughter, JM ;
Chen, E ;
Durlam, M ;
Shi, J ;
DeHerrera, M .
IEEE TRANSACTIONS ON MAGNETICS, 1999, 35 (05) :2814-2819
[10]   Switching field variation in patterned submicron magnetic film elements [J].
Zheng, YF ;
Zhu, JG .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) :5471-5473