Blue light emission from hydrogenated amorphous silicon carbide prepared by xylene source in plasma-enhanced chemical vapour deposition system

被引：6

作者：

Ma, TF ^{[1
]}

Chen, KJ ^{[1
]}

Du, JF ^{[1
]}

Xu, J ^{[1
]}

Li, W ^{[1
]}

Huang, XF ^{[1
]}

机构：

[1] NANJING UNIV,CTR ADV STUDIES SCI & TECHNOL MICROSTRUCT,DEPT PHYS,NANJING 210093,PEOPLES R CHINA

来源：

CHINESE PHYSICS LETTERS | 1996年 / 13卷 / 12期

关键词：

D O I：

10.1088/0256-307X/13/12/020

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We chose xylene C8H10 as carbon source instead of conventional methane CH4 to fabricate a-Si1-xCx:H films using plasma-enhanced chemial vapour deposition method. The optical band gap of this material could be widened to 3.1 eV. And the infrared absorption spectra of our films manifest the existence of aromatic ring in them. Strong blue light emission with a peak wavelength of 490 nm has been observed at room temperature.

引用

页码：947 / 949

页数：3

共 13 条

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