Resolution of an optical image of a scanning near-field optical/atomic force microscope as a function of sample-probe distance during synchronized irradiation

被引：5

作者：

Chiba, N ^{[1
]}

Muramatsu, H ^{[1
]}

Nakajima, K ^{[1
]}

Homma, K ^{[1
]}

Ataka, T ^{[1
]}

Fujihira, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT BIOMOLEC ENGN,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN

来源：

THIN SOLID FILMS | 1996年 / 273卷 / 1-2期

关键词：

atomic force microscopy; optical properties; scanning tunnelling microscopy; surface morphology;

D O I：

10.1016/0040-6090(95)06797-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We examined the resolution of optical images of scanning near-field optical/atomic force microscope (SNOAM) by synchronizing the modulated light to be probe vibration. The system examined in this paper, which we have developed previously, uses a sharpened and bent optical fiber probe. The probe was vibrated vertically toward the specimen stage by dynamic-mode atomic force microscopy function. We controlled the phase and the range of the modulated light using a phase shifter to change the irradiation position. The resolution of optical images showed remarkable change over a 40 nm vertical range of the irradiation position from the sample surface. We obtained the best resolution of the optical image by optimizing the phase and the range of the irradiation. The aperture size was estimated to be 55 nm by comparing the best optical image and topography of our standard pattern.

引用

页码：331 / 334

页数：4

共 15 条

[1] NEAR-FIELD OPTICS - MICROSCOPY, SPECTROSCOPY, AND SURFACE MODIFICATION BEYOND THE DIFFRACTION LIMIT [J].