Kinetic effects on the size homogeneity of Stranski-Krastanow islands

被引：12

作者：

Johansson, J ^{[1
]}

Seifert, W ^{[1
]}

机构：

[1] Lund Univ, S-22100 Lund, Sweden

来源：

APPLIED SURFACE SCIENCE | 1999年 / 148卷 / 1-2期

关键词：

metal organic vapor phase epitaxy; Stranski-Krastanow growth; self-assembling; quantum dots;

D O I：

10.1016/S0169-4332(99)00127-0

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

In this study we present results concerning the size (height) homogeneity of self-assembled quantum dots grown in the Stranski-Krastanow growth mode for different deposition conditions. 3.5 ML InP was deposited on a GaP-stabilized GaAs substrate by metal organic vapor phase epitaxy for varying temperatures, 580-640 degrees C, and varying deposition rates, 0.5-3.5 ML/s. The average height decreases for increasing deposition rate and decreasing temperature. The width of the height distribution decreases with decreasing temperature and shows a non-monotonic behaviour with a minimum as a function of the deposition rate. (C) 1999 Elsevier Science B.V. All rights reserved.

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页码：86 / 91

页数：6

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