Time evolution of surface defect states in hydrogenated amorphous silicon studied by photothermal and photocurrent spectroscopy and optical simulation

被引:17
作者
Holovsky, J. [1 ,2 ]
Schmid, M. [2 ]
Stuckelberger, M. [2 ]
Despeisse, M. [2 ]
Ballif, C. [2 ]
Poruba, A. [1 ]
Vanecek, M. [1 ]
机构
[1] ASCR, Inst Phys, Vvi, Prague 16253 6, Czech Republic
[2] Ecole Polytech Fed Lausanne, Photovolta & Thin Film Elect Lab, Inst Microengn IMT, CH-2000 Neuchatel, Switzerland
关键词
Amorphous silicon; Photocurrent spectroscopy; Surface defects; A-SI-H; THIN-FILMS; DEFLECTION SPECTROSCOPY; BULK-DENSITY; ABSORPTION; CONDUCTANCE; SPECTRA; CPM; PDS;
D O I
10.1016/j.jnoncrysol.2011.12.031
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
The time evolution of surface defect density and width of space charge region in thin layer of amorphous silicon is observed experimentally by Fourier transform photocurrent spectroscopy. This work reviews the assumption that photocurrent is insensitive to surface defects for samples thinner than 1500 nm. We show that correct evaluation based on simple optical model comprising layers representing surface defects and layers representing space charge region with reduced collection allows obtaining the same results as from photothermal deflection spectroscopy. Our main approach is the comparison of photocurrent or photothermal deflection spectra measured in absorptance/transmittance mode from layer and substrate side of the thin film. (C) 2011 Elsevier B.V. All rights reserved.
引用
收藏
页码:2035 / 2038
页数:4
相关论文
共 20 条
[1]   SURFACE AND BULK-DENSITY OF STATES ANALYSIS IN A-SI-H BY A NEW INTERPRETATION OF PDS AND CPM MEASUREMENTS [J].
AMATO, G ;
BENEDETTO, G ;
BOARINO, L ;
SPAGNOLO, R .
SOLID STATE COMMUNICATIONS, 1991, 77 (03) :177-180
[2]   DEPTH PROFILING OF NONUNIFORM OPTICAL-ABSORPTION IN THIN-FILMS - APPLICATION TO HYDROGENATED AMORPHOUS-SILICON [J].
ASANO, A ;
STUTZMANN, M .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (09) :5025-5034
[3]  
BECKER F, 1995, MATER SCI FORUM, V173-, P177, DOI 10.4028/www.scientific.net/MSF.173-174.177
[4]   THERMOOPTICAL SPECTROSCOPY - DETECTION BY THE MIRAGE EFFECT [J].
BOCCARA, AC ;
FOURNIER, D ;
BADOZ, J .
APPLIED PHYSICS LETTERS, 1980, 36 (02) :130-132
[5]  
CURTINS H, 1988, AMORPHOUS SILICON RE, P329
[6]   INVESTIGATION OF SURFACE PASSIVATION OF AMORPHOUS-SILICON USING PHOTOTHERMAL DEFLECTION SPECTROSCOPY [J].
FRYE, RC ;
KUMLER, JJ ;
WONG, CC .
APPLIED PHYSICS LETTERS, 1987, 50 (02) :101-103
[7]   SURFACE-STATES AND IN-DEPTH INHOMOGENEITY IN A-SI-H THIN-FILMS - EFFECTS ON THE SHAPE OF THE PDS SUB-GAP SPECTRA [J].
GRILLO, G ;
DEANGELIS, L .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 :750-752
[8]  
Holovsky J, 2011, FOURIER TRANSFORMS - NEW ANALYTICAL APPROACHES AND FTIR STRATEGIES, P257
[9]   THE EFFECT OF SURFACE-STATES AND FIXED CHARGE ON THE FIELD-EFFECT CONDUCTANCE OF AMORPHOUS-SILICON [J].
POWELL, MJ ;
PRITCHARD, J .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) :3244-3248
[10]   SUPPRESSION OF INTERFERENCE-FRINGES IN ABSORPTION-MEASUREMENTS ON THIN-FILMS [J].
RITTER, D ;
WEISER, K .
OPTICS COMMUNICATIONS, 1986, 57 (05) :336-338