Quantitative coherent diffractive imaging of an integrated circuit at a spatial resolution of 20 nm

被引：48

作者：

Abbey, Brian ^{[1
]}

Williams, Garth J. ^{[1
]}

Pfeifer, Mark A. ^{[2
]}

Clark, Jesse N. ^{[2
]}

Putkunz, Corey T. ^{[2
]}

Torrance, Angela ^{[1
]}

McNulty, Ian ^{[3
]}

Levin, T. M. ^{[4
]}

Peele, Andrew G. ^{[2
]}

Nugent, Keith A. ^{[1
]}

机构：

[1] Univ Melbourne, Sch Phys, Melbourne, Vic 3010, Australia

[2] La Trobe Univ, Dept Phys, Bundoora, Vic 3083, Australia

[3] Argonne Natl Lab, Adv Photon Source, Argonne, IL 60439 USA

[4] IBM Res Albany Nano Tech, Albany, NY 12203 USA

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 21期

基金：

澳大利亚研究理事会;

关键词：

image resolution; integrated circuit testing; light coherence; refractive index; voids (solid);

D O I：

10.1063/1.3025819

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The complex transmission function of an integrated circuit is reconstructed at 20 nm spatial resolution using coherent diffractive imaging. A quantitative map is made of the exit surface wave emerging from void defects within the circuit interconnect. Assuming a known index of refraction for the substrate allows the volume of these voids to be estimated from the phase retardation in this region. Sample scanning and tomography of extended objects using coherent diffractive imaging is demonstrated.

引用

页数：3

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