A roller embossing process for rapid fabrication of microlens arrays on glass substrates

被引:90
作者
Chang, C. Y. [1 ]
Yang, S. Y. [1 ]
Sheh, J. L. [1 ]
机构
[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 106, Taiwan
来源
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 08期
关键词
microlens array; ultraviolet embossing; hot embossing; roller embossing; replication;
D O I
10.1007/s00542-006-0103-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper reports an innovative technique for rapid fabrication of polymeric microlens arrays based on UV roller embossing process. In this method, a thin flat mold is fabricated by electroforming of nickel against a microlens master. The thin Ni mold with microlens cavities is then wrapped onto cylinder to form the roller. During rolling operation, the roller pressing and dragging the UV-curable photopolymer layer on the glass substrate through the rolling zone, the microlens array is formed. At the same time, the microlens array is cured by the UV light radiation while traveling through the rolling zone. The technique can be developed to an effective roll-to-roll process at room temperature and with low pressure. In this study, a roller embossing facility with UV exposure capacity has been designed, constructed and tested. Under the proper processing conditions, the 100x100 arrays of polymeric microlens, with a diameter of 100 mu m, a pitch of 200 mu m and a sag height of 21 mu m can be successfully fabricated.
引用
收藏
页码:754 / 759
页数:6
相关论文
共 14 条
[1]   Hot embossing as a method for the fabrication of polymer high aspect ratio structures [J].
Becker, H ;
Heim, U .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :130-135
[2]   Simulation and investigation of factors affecting high aspect ratio UV embossing [J].
Chan-Park, MB ;
Lam, YC ;
Laulia, P ;
Joshi, SC .
LANGMUIR, 2005, 21 (05) :2000-2007
[3]   Fabrication of high aspect ratio poly(ethylene glycol)-containing microstructures by UV embossing [J].
Chan-Park, MB ;
Yan, YH ;
Neo, WK ;
Zhou, WX ;
Zhang, J ;
Yue, CY .
LANGMUIR, 2003, 19 (10) :4371-4380
[4]  
Chang JH, 2003, MICROSYST TECHNOL, V10, P76, DOI [10.1007/s00542-003-0311-1, 10.1007/S00542-003-0311-1]
[5]   THE MANUFACTURE OF MICROLENSES BY MELTING PHOTORESIST [J].
DALY, D ;
STEVENS, RF ;
HUTLEY, MC ;
DAVIES, N .
MEASUREMENT SCIENCE AND TECHNOLOGY, 1990, 1 (08) :759-766
[6]   Simple reflow technique for fabrication of a microlens array in solgel glass [J].
He, M ;
Yuan, XC ;
Ngo, NQ ;
Bu, J ;
Kudryashov, V .
OPTICS LETTERS, 2003, 28 (09) :731-733
[7]   Hot embossing - The molding technique for plastic microstructures [J].
Heckele, M ;
Bacher, W ;
Muller, KD .
MICROSYSTEM TECHNOLOGIES, 1998, 4 (03) :122-124
[8]   Replication of microlens arrays by injection molding [J].
Lee, BK ;
Kim, DS ;
Kwon, TH .
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2004, 10 (6-7) :531-535
[9]   Hexagonal microlens array modeling and fabrication using a thermal reflow process [J].
Lin, CP ;
Yang, HS ;
Chao, CK .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (05) :775-781
[10]   MICROJET FABRICATION OF MICROLENS ARRAYS [J].
MACFARLANE, DL ;
NARAYAN, V ;
TATUM, JA ;
COX, WR ;
CHEN, T ;
HAYES, DJ .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1994, 6 (09) :1112-1114