Replication of microlens arrays by injection molding

被引：104

作者：

Lee, BK ^{[1
]}

Kim, DS ^{[1
]}

Kwon, TH ^{[1
]}

机构：

[1] Pohang Univ Sci & Technol, Dept Mech Engn, Pohang 790784, South Korea

来源：

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2004年 / 10卷 / 6-7期

关键词：

D O I：

10.1007/s00542-004-0387-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Injection molding could be used as a mass production technology for microlens arrays. It is of importance, and thus of our concern in the present study, to understand the injection molding processing condition effects on the replicability of microlens array profile. Extensive experiments were performed by varying processing conditions such as flow rate, packing pressure and packing time for three different polymeric materials (PS, PMMA and PC). The nickel mold insert of microlens arrays was made by electroplating a microstructure master fabricated by a modified LIGA process. Effects of processing conditions on the replicability were investigated with the help of the surface profile measurements. Experimental results showed that a packing pressure and a flow rate significantly affects a final surface profile of the injection molded product. Atomic force microscope measurement indicated that the averaged surface roughness value of injection molded microlens arrays is smaller than that of mold insert and is comparable with that of fine optical components in practical use.

引用

页码：531 / 535

页数：5

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