Electromechanical carbon nanotube switches for high-frequency applications

被引：141

作者：

Kaul, Anupama B. ^{[1
]}

Wong, Eric W. ^{[1
]}

Epp, Larry ^{[1
]}

Hunt, Brian D. ^{[1
]}

机构：

[1] CALTECH, Jet Prop Lab, Pasadena, CA 91109 USA

来源：

NANO LETTERS | 2006年 / 6卷 / 05期

关键词：

D O I：

10.1021/nl052552r

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We describe the fabrication and characterization of a nanoelectromechanical (NEM) switch based on carbon nanotubes. Our NEM structure consists of single-walled nanotubes (SWNTs) suspended over shallow trenches in a SiO2 layer, with a Nb pull electrode beneath. The nanotube growth is done on-chip using a patterned Fe catalyst and a methane chemical vapor deposition (CVD) process at 850 degrees C. Electrical measurements of these devices show well-defined ON and OFF states as a dc bias up to a few volts is applied between the CNT and the Nb pull electrode. The CNT switches were measured to have speeds that are 3 orders of magnitude higher than MEMS-based electrostatically driven switches, with switching times down to a few nanoseconds, while at the same time requiring pull voltages less than 5 V.

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收藏

页码：942 / 947

页数：6

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