Deep ultraviolet light-emitting diodes using quaternary AlInGaN multiple quantum wells

被引:53
作者
Shatalov, M [1 ]
Zhang, J [1 ]
Chitnis, AS [1 ]
Adivarahan, V [1 ]
Yang, J [1 ]
Simin, G [1 ]
Khan, MA [1 ]
机构
[1] Univ S Carolina, Dept Elect Engn, Columbia, SC 29208 USA
关键词
epitaxial growth; light-emitting diodes; lighting; quantum-well devices; ultraviolet generation;
D O I
10.1109/2944.999185
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we report on the growth, fabrication, and characterization of deep ultraviolet (UV) light-emitting diodes (LEDs) with quaternary AlInGaN-AlInGaN multiple quantum wells (MQWs) in the active region. These high quality quaternary MQWs were deposited over sapphire and n-SiC substrates using a novel pulsed atomic layer epitaxy (PALE) technique. LEDs with peak emission wavelengths from 305-340 nm were fabricated and characterized. Using square geometry devices over sapphire and n-SiC substrates we studied the role of current crowding. Numerical simulation results are also provided to explain the observed current-voltage and light-emission characteristics.
引用
收藏
页码:302 / 309
页数:8
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