Planar Variable Inductor Controlled by Ferrofluid Actuation

被引:15
作者
Assadsangabi, Babak [1 ]
Ali, Mohamed Sultan Mohamed [1 ,2 ]
Takahata, Kenichi [1 ]
机构
[1] Univ British Columbia, Dept Elect & Comp Engn, Vancouver, BC V6T 1Z4, Canada
[2] Univ Teknol Malaysia, Fac Elect Engn, Skudai 81310, Johor, Malaysia
基金
加拿大自然科学与工程研究理事会; 加拿大创新基金会;
关键词
Ferrofluids; magnetic actuation; micro-electro-mechanical systems (MEMS); variable inductors;
D O I
10.1109/TMAG.2012.2228212
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];
摘要
This paper reports a micropatterned variable inductor that utilizes ferrofluid as the movable magnetic core. Ferrofluid is displaced over the planar inductor using the magnetic field provided by another "actuation" coil aligned to the inductor, varying permeability distribution on the inductor to control its inductance. Superimposing a bias field on the varying magnetic field uniquely enables repelling of the fluid from the inductor, as well as switching between repelling and attracting motions simply by changing the direction of the driving current to the actuation coil. Microfabricated devices are tested to reveal that the repelling-mode operation provides 6.1 x larger inductive changes than those available with the attracting mode. The continuous modulation of inductance is demonstrated with a tuning range of 16% using input currents up to 1.2 A. Frequency tuning using a resonant tank formed with the device is also demonstrated to show a 76-ppm/mA frequency sensitivity to the input current.
引用
收藏
页码:1402 / 1406
页数:5
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