Epitaxial growth of erbium silicide nanowires on silicon(001)

被引:31
作者
Chen, Y [1 ]
Ohlberg, DAA [1 ]
Williams, RS [1 ]
机构
[1] Hewlett Packard Labs, Quantum Sci Res, Palo Alto, CA 94304 USA
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2001年 / 87卷 / 03期
关键词
silicon(001); nanowires; epitaxial;
D O I
10.1016/S0921-5107(01)00734-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Submonolayer amounts of Er deposited onto Si(001) react with the substrate to form epitaxial nanowires of crystalline ErSi2. The ErSi2 nanowires are <1 nm high, a few nanometers wide, close to a micron long, and crystallographically aligned to Si < 110 > directions. The growth of uniaxial structures occurs because the different crystal structures of ErSi2 and Si have a good lattice match along one Si < 110 > crystallographic axis (- 1.3%) but a significant mismatch along the perpendicular Si < 110 > axis (+ 6.5%). An energetic model explains the formation of the ErSi2 nanowires. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:222 / 226
页数:5
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