Lithography-modulated self-assembly of small ferroelectric Pb(Zr,Ti)O3 single crystals

被引：42

作者：

Bühlmann, S ^{[1
]}

Muralt, P ^{[1
]}

Von Allmen, S ^{[1
]}

机构：

[1] Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 14期

关键词：

D O I：

10.1063/1.1690873

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Triangular (111) and square-shaped (100) Pb(Zr,Ti)O-3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as the substrate. An epitaxial 2 nm thick rutile TiO2 film was grown and patterned into 100-200 nm wide attachment sites by electron beam lithography. The perovskite nucleation density was 60 times higher on TiO2 seeds than on bare Pt(111). (C) 2004 American Institute of Physics.

引用

页码：2614 / 2616

页数：3

共 19 条

[1] Polarization imprint and size effects in mesoscopic ferroelectric structures [J].

Alexe, M ;

Harnagea, C ;

Hesse, D ;

Gösele, U .

APPLIED PHYSICS LETTERS, 2001, 79 (02) :242-244

[2] Etching of RuO2 and Pt thin films with ECR/RF reactor [J].

Baborowski, J ;

Muralt, P ;

Ledermann, N ;

Hiboux, S .

VACUUM, 2000, 56 (01) :51-56

[3] Size effect in mesoscopic epitaxial ferroelectric structures:: Increase of piezoelectric response with decreasing feature size [J].

Bühlmann, S ;

Dwir, B ;

Baborowski, J ;

Muralt, P .

APPLIED PHYSICS LETTERS, 2002, 80 (17) :3195-3197

[4] Observations of island structures at the initial growth stage of PbZrxTi1-xO3 thin films prepared by metalorganic chemical vapor deposition [J].

Fujisawa, H ;

Morimoto, K ;

Shimizu, M ;

Niu, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2000, 39 (9B) :5446-5450

[5] Calixarene electron beam resist for nano-lithography [J].

Fujita, J ;

Ohnishi, Y ;

Manako, S ;

Ochiai, Y ;

Nomura, E ;

Sakamoto, T ;

Matsui, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (12B) :7769-7772

[6] Scaling of ferroelectric properties in thin films [J].

Ganpule, CS ;

Stanishevsky, A ;

Su, Q ;

Aggarwal, S ;

Melngailis, J ;

Williams, E ;

Ramesh, R .

APPLIED PHYSICS LETTERS, 1999, 75 (03) :409-411

[7] Nanoscale imaging of domain dynamics and retention in ferroelectric thin films [J].

Gruverman, A ;

Tokumoto, H ;

Prakash, AS ;

Aggarwal, S ;

Yang, B ;

Wuttig, M ;

Ramesh, R ;

Auciello, O ;

Venkatesan, T .

APPLIED PHYSICS LETTERS, 1997, 71 (24) :3492-3494

[8] Domain and lattice contributions to dielectric and piezoelectric properties of Pb(Zrx,Ti1-x)O3 thin films as a function of composition [J].

Hiboux, S ;

Muralt, P ;

Maeder, T .

JOURNAL OF MATERIALS RESEARCH, 1999, 14 (11) :4307-4318

[9] Mixed titania-lead oxide seed layers for PZT growth on Pt(111): a study on nucleation, texture and properties [J].

Hiboux, S ;

Muralt, P .

JOURNAL OF THE EUROPEAN CERAMIC SOCIETY, 2004, 24 (06) :1593-1596

[10] Quasi-ideal strontium titanate crystal surfaces through formation of strontium hydroxide [J].

Koster, G ;

Kropman, BL ;

Rijnders, GJHM ;

Blank, DHA ;

Rogalla, H .

APPLIED PHYSICS LETTERS, 1998, 73 (20) :2920-2922

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