TEM study of {10(1)over-bar0} inversion domains in GaN layers grown on {0001} sapphire substrate

被引:18
作者
Potin, V [1 ]
Ruterana, P [1 ]
Nouet, G [1 ]
机构
[1] Inst Sci Mat & Rayonnement, Lab Etud & Rech Mat, CNRS, F-14050 Caen, France
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1999年 / 59卷 / 1-3期
关键词
inversion domains; gallium nitride; high resolution electron microscopy; molecular beam epitaxy;
D O I
10.1016/S0921-5107(98)00407-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The atomic structure of nanometric inversion domains in GaN layers has been investigated using high resolution electron microscopy and image simulation. These domains are limited by {10 (1) over bar 0} planes; they cross the whole epitaxial layers until the surface in the center of small pyramids. For image simulation, six models were considered and a good agreement with the observations was obtained for a model characterized by an inversion and a c/2 translation. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:173 / 176
页数:4
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