Comparison of the properties for ZnO:Al films deposited on polyimide and glass substrates

被引：45

作者：

Hao, XT ^{[1
]}

Ma, J

Zhang, DH

Yang, YG

Ma, HL

Cheng, CF

Liu, XD

机构：

[1] Shandong Univ, Sch Phys & Microelect, Jinan 250100, Peoples R China

[2] Shandong Normal Univ, Dept Phys, Jinan 250100, Peoples R China

来源：

MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 2002年 / 90卷 / 1-2期

基金：

中国国家自然科学基金;

关键词：

organic substrate; aluminum doped zinc oxide film; transparent conductive film;

D O I：

10.1016/S0921-5107(01)00828-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conducting aluminum-doped zinc oxide (ZnO:Al) films have been prepared on polyimide (PI) and Corning 7059 substrates by r.f. magnetron sputtering technique at low substrate temperature (25-210 degreesC). Polycrystalline ZnO:Al films having a preferred orientation with the c-axis perpendicular to the substrate were deposited with resistivity as low as 8.5 x 10(-4) Omega cm on PI substrates and 7.1 x 10(-4) Omega cm on glass substrates. The average transmittance exceeded 74 and 85% in the visible spectrum for 360 and 390 nm thick films deposited on PI and glass, respectively. A comparison of the properties of the films deposited on glass and organic substrates was performed. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：50 / 54

页数：5

共 10 条

[1]

BRAGG WL, 1946, CRYSTALLINE STATE, V1, P189

[2] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[3]

Chu W., 1978, BACKSCATTERING SPECT, DOI DOI 10.1016/B978-0-12-173850-1.50008-9

[4] WINDOW COATINGS FOR THE FUTURE [J].

GRANQVIST, CG .

THIN SOLID FILMS, 1990, 193 (1-2) :730-741

[5] ELECTRICAL AND OPTICAL-PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS DEPOSITED ON UNHEATED SUBSTRATES BY DC REACTIVE SPUTTERING [J].

KARASAWA, T ;

MIYATA, Y .

THIN SOLID FILMS, 1993, 223 (01) :135-139

[6] Preparation and characterization of ITO films deposited on polyimide by reactive evaporation at low temperature [J].

Ma, J ;

Zhang, DH ;

Zhao, JQ ;

Tan, CY ;

Yang, TL ;

Ma, HL .

APPLIED SURFACE SCIENCE, 1999, 151 (3-4) :239-243

[7]

MA J, 1988, THIN SOLID FILMS, V167, P200

[8] RF-SPUTTERED INDIUM TIN OXIDE-FILMS ON WATER-COOLED SUBSTRATES [J].

MANSINGH, A ;

KUMAR, CVRV .

THIN SOLID FILMS, 1988, 167 (1-2) :L11-L13

[9] Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering [J].

Yang, TL ;

Zhang, DH ;

Ma, J ;

Ma, HL ;

Chen, Y .

THIN SOLID FILMS, 1998, 326 (1-2) :60-62

[10] Preparation of transparent conducting ZnO:Al films on polymer substrates by r. f. magnetron sputtering [J].

Zhang, DH ;

Yang, TL ;

Ma, J ;

Wang, QP ;

Gao, RW ;

Ma, HL .

APPLIED SURFACE SCIENCE, 2000, 158 (1-2) :43-48

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