Monte-Carlo investigation of in-plane electron transport in tensile strained Si and Si1-yCy (y ≤ 0.03)

Electron transport properties in tensile strained Si-based materials are theoretically analyzed using Monte-Carlo calculation. We focus our interest on in-plane transport in Si and Si1-yCy (y less than or equal to 0.03), grown respectively on [001] Si1-xGex pseudo-substrate and Si substrate, with a view to Field-Effect-Transistor application. In comparison with unstrained Si, the tensile strain effect is shown to be very attractive in Si: drift mobilities greater than 3000 cm(2)/Vs are obtained at 300 K for a Ge fraction mole of 0.2 in the pseudo-substrate. In the Si1-yCy/Si system, that does not need any pseudo-substrate, the beneficial strain effect on transport is counterbalanced by the alloy scattering whose influence on mobility is studied. If the alloy potential is greater than about 1 eV, the advantage of strain-induced reduction of effective mass is lost in terms of stationary transport performance at 300 K.