Manipulation of laser ablation plume by magnetic field application

被引:36
作者
Tachiki, M [1 ]
Kobayashi, T [1 ]
机构
[1] Osaka Univ, Div Adv Elect & Opt Sci, Dept Phys Sci, Grad Sch Engn Sci, Toyonaka, Osaka 5608531, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 6A期
关键词
pulsed laser deposition; Shadow mask; framing streak camera; magnetic field; laser ablation;
D O I
10.1143/JJAP.38.3642
中图分类号
O59 [应用物理学];
学科分类号
摘要
Time- and wavelength-resolved observation of a laser ablation plume from a strontium titanate target was performed under a dipole magnetic field applied from the substrate side. In contrast to the conventional method, the present method gave rise to increasing ionization of the growth species in the plume in the vicinity of the substrate. Using this method, NiO films could be epitaxially grown on (100)MgO substrates even at room temperature. When we placed a shadow mask between the target and the substrate (eclipse method), the deposition rate was increased to by 2.6-fold that under zero magnetic field.
引用
收藏
页码:3642 / 3645
页数:4
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