Mismatches after hot-carrier injection in advanced complementary metal-oxide-semiconductor technology particularly for analog applications

被引:3
作者
Chen, Shuang-Yuan
Lin, Jung-Chun
Chen, Hung-Wen
Lin, Hung-Chuan
Jhou, Ze-Wei
Chou, Sam
Ko, Joe
Lei, Tien-Fu
Haung, Heng-Sheng
机构
[1] Natl Taipei Univ Technol, Inst Mechatron Engn, Taipei 106, Taiwan
[2] United Microelect Corp, Special Technol Div, Hsinchu 300, Taiwan
[3] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu 300, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 4B期
关键词
mismatch; HCI; hot carrier; matching;
D O I
10.1143/JJAP.45.3266
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper, the impact of hot carrier stress on the mismatch properties of n and p metal-oxide-semiconductor (MOS) field-effect transistors (FETs) with different sizes produced using 0.15 mu m complementary MOS (CMOS) technology is presented for the first time. The research reveals that hot-carrier injection (HCI) does degrade the matching properties of MOSFETs. The degree of degradation closely depends on the strength of the HC effect. Thus, it is found that, under the stress condition of drain avalanche hot carrier (DAHC), the properties of nMOSFETs rapidly and greatly become worse, but the changes are small for pMOSFETs. For analog circuit parameters, it is found that the after-stress lines of n and pMOSFETs exhibit a cross point in sigma (Delta V-t,V-op) drawings. It is suggested that the cross point can be used to indicate the minimal size in order for n and p pairs to have the same degree of Delta V-t.op mismatch in designing analog circuits. In addition, interpretations for the differences between n and pMOSFETs and between Delta V-t,V-op and I-ds,I-op mismatches are provided with experimental verifications.
引用
收藏
页码:3266 / 3271
页数:6
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