High-power and highly reliable operation of Al-free InGaAs-InGaAsP 0.98-μm lasers with a window structure fabricated by Si ion implantation

被引:28
作者
Hiramoto, K [1 ]
Sagawa, M [1 ]
Kikawa, T [1 ]
Tsuji, S [1 ]
机构
[1] Hitachi Ltd, Cent Res Labs, Kokubunji, Tokyo 185, Japan
关键词
gallium materials/devices; indium materials/devices; optical communication; optical fiber amplifiers; semiconductor devices; semiconductor lasers; window structure;
D O I
10.1109/2944.788455
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have fabricated Al-free InGaAs-InGaAsP-GaAs strained quantum-well 0.98-mu m lasers with a window structure. The window structure was obtained by Si ion-implantation-induced QW intermixing. The photoluminescence and photocurrent measurements show that an implantation energy of 100 keV and a dose of 1E13 cm(-2) are enough for the fabrication of the window structure in our laser structure. The threshold current of the fabricated 0.98-mu m lasers with a window structure is 20 mA and a stable lateral mode is obtained up to 300 mW, and these results suggest that there is no scattering loss or absorption due to the introduction of a window structure. The reliability of the lasers is greatly Improved by the introduction of the window structure: they exhibited stable operation for more than 1000 h at 240-mW output power at 50 degrees C. And this results gives us an estimated lifetime of more than 200 000 h at 25 degrees C.
引用
收藏
页码:817 / 821
页数:5
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