Molecular beam epitaxial growth of InGaAsN:Sb/GaAs quantum wells for long-wavelength semiconductor lasers

被引:169
作者
Yang, X [1 ]
Jurkovic, MJ [1 ]
Heroux, JB [1 ]
Wang, WI [1 ]
机构
[1] Columbia Univ, Dept Elect Engn, New York, NY 10027 USA
关键词
D O I
10.1063/1.124311
中图分类号
O59 [应用物理学];
学科分类号
摘要
InGaAsN:Sb/GaAs quantum wells (QWs) were grown by solid-source molecular beam epitaxy using a N-2 radio-frequency plasma source. Photoluminescence reveals an enhancement in the optical properties of InGaAsN/GaAs QWs by the introduction of Sb flux during growth. X-ray diffraction and reflection high-energy electron diffraction analyses indicate that Sb acts as a surfactant. This technique was used to improve the performance of long-wavelength InGaAsN laser diodes. A low-threshold current density of 520 A/cm(2) was achieved for an InGaAsN:Sb/GaAs single quantum well 1.2 mu m laser diode at room temperature under pulsed operation. (C) 1999 American Institute of Physics. [S0003-6951(99)00727-5].
引用
收藏
页码:178 / 180
页数:3
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