Membrane mirrors for vision science adaptive optics

被引：4

作者：

Kurczynski, P ^{[1
]}

Tyson, JA ^{[1
]}

Sadoulet, B ^{[1
]}

Bishop, D ^{[1
]}

Williams, DR ^{[1
]}

机构：

[1] Lucent Technol, Bell Labs, Murray Hill, NJ 07049 USA

来源：

MOEMS AND MINIATURIZED SYSTEMS II | 2001年 / 4561卷

关键词：

adaptive optics; MEMS; MOEMS; optical MEMS; micromirrors; deformable mirrors; ocular aberrations;

D O I：

10.1117/12.443108

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Adaptive optics provides a means to measure and correct aberrations in human vision. This technology is being used to diagnose vision problems, study the mechanism of human vision, and extend the capabilities of nature's optics. The ideal wavefront corrector for vision science adaptive optics would have greater stroke, and more degrees of freedom than is currently available. Micromachined deformable mirrors may soon meet these demands. Membrane mirrors in particular offer a promising alternative to other MEMS deformable mirror designs. A new type of mirror, employing a bound charge layer on the membrane, may overcome some of the limitations of previous membrane mirrors.

引用

页码：147 / 162

页数：16

共 57 条

[1] Smart microscope: an adaptive optics learning system for aberration correction in multiphoton confocal microscopy [J].

Albert, O ;

Sherman, L ;

Mourou, G ;

Norris, TB ;

Vdovin, G .

OPTICS LETTERS, 2000, 25 (01) :52-54

[2]

Aldrich RE, 2000, OPT ENGIN, V67, P151

[3] Membrane mirror and bias electronics [J].

Burley, GS ;

Stilburn, JR ;

Walker, GAH .

APPLIED OPTICS, 1998, 37 (21) :4649-4655

[4]

Centamore R. M., 1991, SPIE, V1543, P128

[5] CONFIGURING AN ELECTROSTATIC MEMBRANE MIRROR BY LEAST-SQUARES FITTING WITH ANALYTICALLY DERIVED INFLUENCE FUNCTIONS [J].

CLAFLIN, ES ;

BAREKET, N .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1986, 3 (11) :1833-1839

[6]

COWAN HD, 2000, ADAPTIVE OPTICS ENG, P249

[7] Evaluation of microfabricated deformable mirror systems [J].

Cowan, WD ;

Lee, MK ;

Bright, VM ;

Welsh, BM .

ADAPTIVE OPTICAL SYSTEM TECHNOLOGIES, PARTS 1 AND 2, 1998, 3353 :790-804

[8] Optical phase modulation using a refractive lenslet array and microelectromechanical deformable mirror [J].

Cowan, WD ;

Lee, MK ;

Welsh, BM ;

Bright, VM ;

Roggemann, MC .

OPTICAL ENGINEERING, 1998, 37 (12) :3237-3247

[9] Deformable magnetic mirror for adaptive optics: technological aspects [J].

Cugat, O ;

Basrour, S ;

Divoux, C ;

Mounaix, P ;

Reyne, G .

SENSORS AND ACTUATORS A-PHYSICAL, 2001, 89 (1-2) :1-9

[10] Miniaturised deformable magnetic mirror for adaptive optics [J].

Divoux, C ;

Cugat, O ;

Basrour, S ;

Mounaix, P ;

Kern, P ;

Boussey-Said, J .

ADAPTIVE OPTICAL SYSTEM TECHNOLOGIES, PARTS 1 AND 2, 1998, 3353 :850-857

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