Deformable magnetic mirror for adaptive optics: technological aspects

被引：54

作者：

Cugat, O

Basrour, S

Divoux, C

Mounaix, P

Reyne, G

机构：

[1] ENSIEG, LEG, F-38402 St Martin Dheres, France

[2] IMFC, LPMO, F-25044 Besancon, France

[3] IEMN, F-59652 Villeneuve Dascq, France

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 89卷 / 1-2期

关键词：

planar coils; magnetic microactuator; deformable mirror; adaptive optics;

D O I：

10.1016/S0924-4247(00)00550-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Ground-based telescopes suffer from atmospheric turbulences which perturb the quality of the light arriving from space. Astronomers use adaptive optics in order to correct the wavefront of oncoming light. In this context, a prototype of electromagnetic miniature (diameter 50 mm) deformable mirror is developed, using available microtechnologies. The mirror is composed of a thin polymer membrane (2-5 mum) covered with a matrix of permanent magnets, and of an array of planar microcoils on a diameter 50 mm substrate. The paper presents the various technologies used to build the actuator (membranes, coils, magnets). The mechanical behaviour of the mirror is tested. Deformations of up to 20 mum are achieved with currents in the range 1-3 A (6.6 mum/A). Resonance occurs at 485 Hz, with good linearity up to 200 Hz. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：1 / 9

页数：9

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[2]

Cugat O., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P485, DOI 10.1109/MEMSYS.2000.838565

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