Deformable magnetic mirror for adaptive optics: technological aspects

被引:54
作者
Cugat, O
Basrour, S
Divoux, C
Mounaix, P
Reyne, G
机构
[1] ENSIEG, LEG, F-38402 St Martin Dheres, France
[2] IMFC, LPMO, F-25044 Besancon, France
[3] IEMN, F-59652 Villeneuve Dascq, France
关键词
planar coils; magnetic microactuator; deformable mirror; adaptive optics;
D O I
10.1016/S0924-4247(00)00550-1
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Ground-based telescopes suffer from atmospheric turbulences which perturb the quality of the light arriving from space. Astronomers use adaptive optics in order to correct the wavefront of oncoming light. In this context, a prototype of electromagnetic miniature (diameter 50 mm) deformable mirror is developed, using available microtechnologies. The mirror is composed of a thin polymer membrane (2-5 mum) covered with a matrix of permanent magnets, and of an array of planar microcoils on a diameter 50 mm substrate. The paper presents the various technologies used to build the actuator (membranes, coils, magnets). The mechanical behaviour of the mirror is tested. Deformations of up to 20 mum are achieved with currents in the range 1-3 A (6.6 mum/A). Resonance occurs at 485 Hz, with good linearity up to 200 Hz. (C) 2001 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1 / 9
页数:9
相关论文
共 10 条
[1]   FABRICATION OF A MAGNETIC TRANSDUCER COMPOSED OF A HIGH-DENSITY ARRAY OF MICROELECTROMAGNETS WITH ON-CHIP ELECTRONICS [J].
CARDOT, F ;
GOBET, J ;
BOGDANSKI, M ;
RUDOLF, F .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :11-16
[2]  
Cugat O., 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), P485, DOI 10.1109/MEMSYS.2000.838565
[3]   Fabrication of an electrostatic wobble micromotor using deep-etch UV lithography, nickel electroforming and a titanium sacrificial layer [J].
Daniau, W ;
Ballandras, S ;
Kubat, L ;
Hardin, J ;
Martin, G ;
Basrour, S .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1995, 5 (04) :270-275
[4]   Deformable mirror using magnetic membranes: Application to adaptive optics in astrophysics [J].
Divoux, C ;
Cugat, O ;
Reyne, G ;
Boussey-Said, J ;
Basrour, S .
IEEE TRANSACTIONS ON MAGNETICS, 1998, 34 (05) :3564-3567
[5]  
DIVOUX C, 1998, SPIE, V3355
[6]  
KERN P, 1990, ADAPTIVE OPTICS OPTI, V1271, P243
[7]   Transparent masks for aligned deep x-ray lithography/LIGA: low-cost well-performing alternative using glass membranes [J].
Kupka, PK ;
Megtert, S ;
Roulliay, M ;
Bouamrane, F .
MATERIALS AND DEVICE CHARACTERIZATION IN MICROMACHINING, 1998, 3512 :271-276
[8]   STRUCTURE AND MAGNETIC-PROPERTIES OF SPUTTERED ND-FE-B ALLOYS [J].
LINETSKY, YL ;
KORNILOV, NV .
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE, 1995, 4 (02) :188-195
[9]   Coplanar waveguides on dielectric membranes micromachined on a GaAs substrate [J].
Salzenstein, P ;
Dupuis, O ;
Helal, M ;
Lheurette, E ;
Vanbesien, O ;
Mounaix, P ;
Lippens, D .
ELECTRONICS LETTERS, 1996, 32 (09) :821-822
[10]   Technology and applications of micromachined adaptive mirrors [J].
Vdovin, G ;
Sarro, PM ;
Middelhoek, S .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1999, 9 (02) :R8-R19