Microwave-excited atmospheric-pressure plasma jets using a microstrip line

被引：52

作者：

Kim, Jaeho ^{[1
]}

Katsurai, Makoto ^{[2
]}

Kim, Dongmin ^{[3
]}

Ohsaki, Hyroyuki ^{[3
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Nanotube Res Ctr, Nanocoating Team, Tsukuba, Ibaraki 3058565, Japan

[2] Open Univ Japan, Tokyo Bunkyo Study Ctr, Tokyo 1120012, Japan

[3] Univ Tokyo, Grad Sch Frontier Sci, Dept Adv Energy, Kashiwa, Chiba 2778561, Japan

来源：

APPLIED PHYSICS LETTERS | 2008年 / 93卷 / 19期

关键词：

finite difference time-domain analysis; nozzles; plasma jets; plasma simulation; visible spectra;

D O I：

10.1063/1.3025841

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report a 2.45 GHz microwave-excited atmospheric-pressure plasma jet (MW-APPJ) device using a microstrip line for materials processing. A three-dimensional simulation based on the finite difference time domain method revealed that the configuration of the MW-APPJ device results in a strong concentration of electric fields at the gas nozzle. Argon plasmas were generated at the nozzle and were blown into ambient air with the maximum length of 5 mm at a microwave power of 40 W. The rotational temperatures of molecular nitrogen in the downstream of the plasma jets, measured by optical emission spectroscopy, were 1720 to 900 K for gas flow rates from 0.5 to 3.5 l/min, indicating that the jets were nonthermal plasmas. This MW-APPJ device will provide a large-area APPJ for materials processing depending on the configuration of the nozzle array and microstrip lines.

引用

页数：3

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