In-situ monitoring of InP(100) and GaP(100) interfaces and characterization with RDS at 20 K

被引:26
作者
Hannappel, T [1 ]
Töben, L [1 ]
Möller, K [1 ]
Willig, F [1 ]
机构
[1] Hahn Meitner Inst Berlin GmbH, D-14109 Berlin, Germany
关键词
indium phosphide (InP); gallium phosphide (GaP); reflectance difference/anisotropy spectroscopy (RDS/RAS); optical in-situ spectroscopy; metal organic vapor phase epitaxy (MOVPE); ultra high vacuum (UHV); surface reconstruction;
D O I
10.1007/s11664-001-0196-7
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
MOVPE-preparation of highly ordered InP(100) and GaP(100) surfaces was monitored with in-situ reflectance difference spectroscopy (RDS). Specific ordered P-terminated and ordered cation-terminated surface reconstructions were identified with specific structured RD spectra with the highest peaks. After contamination-free transfer of the samples to UHV, RDS measurements were performed also at 20 K. The experimental RD spectrum for the In-terminated, (2x4) reconstructed InP(100) surface shows a remarkable similarity to a recently published theoretical spectrum, whereas there is only moderate similarity between the experimental RD spectrum for the (2x4) reconstructed Ga-terminated GaP(100) surface and a recently proposed theoretical spectrum.
引用
收藏
页码:1425 / 1428
页数:4
相关论文
共 20 条
[1]  
Bechstedt F, 1999, PHYS STATUS SOLIDI A, V175, P5, DOI 10.1002/(SICI)1521-396X(199909)175:1<5::AID-PSSA5>3.0.CO
[2]  
2-9
[3]   GaP(001) and InP(001): Reflectance anisotropy and surface geometry [J].
Esser, N ;
Schmidt, WG ;
Bernholc, J ;
Frisch, AM ;
Vogt, P ;
Zorn, M ;
Pristovsek, M ;
Richter, W ;
Bechstedt, F ;
Hannappel, T ;
Visbeck, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (04) :1691-1696
[4]   EVAPORATION OF INP UNDER KNUDSEN (EQUILIBRIUM) AND LANGMUIR (FREE) EVAPORATION CONDITIONS [J].
FARROW, RFC .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1974, 7 (17) :2436-2448
[5]   Angle resolved photoemission spectroscopy of the InP(001) surface [J].
Frisch, AM ;
Vogt, P ;
Visbeck, S ;
Hannappel, T ;
Willig, F ;
Braun, W ;
Richter, W ;
Bernholc, J ;
Schmidt, WG ;
Esser, N .
APPLIED SURFACE SCIENCE, 2000, 166 (1-4) :224-230
[6]   UPS and 20 K reflectance anisotropy spectroscopy of the P-rich and In-rich surfaces of InP(100) [J].
Hannappel, T ;
Töben, L ;
Visbeck, S ;
Crawack, HJ ;
Pettenkofer, C ;
Willig, F .
SURFACE SCIENCE, 2000, 470 (1-2) :L1-L6
[7]   Reflectance anisotropy spectra for the transition from the P-rich to the In-rich surface reconstruction of InP(100) [J].
Hannappel, T ;
Visbeck, S ;
Zorn, M ;
Zettler, JT ;
Willig, F .
JOURNAL OF CRYSTAL GROWTH, 2000, 221 :124-128
[8]   Preparation of P-rich InP surfaces via MOCVD and surface characterization in UHV [J].
Hannappel, T ;
Visbeck, S ;
Knorr, K ;
Mahrt, J ;
Zorn, M ;
Willig, F .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (04) :427-431
[9]  
HANNAPPEL T, 1999, Patent No. 19837851
[10]   TEMPERATURE-DEPENDENCE OF THE INTERBAND CRITICAL-POINT PARAMETERS OF INP [J].
LAUTENSCHLAGER, P ;
GARRIGA, M ;
CARDONA, M .
PHYSICAL REVIEW B, 1987, 36 (09) :4813-4820