Molecular patterning using two-dimensional polymer Langmuir-Blodgett films

被引：13

作者：

Aoki, A ^{[1
]}

Miyashita, T ^{[1
]}

机构：

[1] TOHOKU UNIV,INST CHEM REACT SCI,AOBA KU,SENDAI,MIYAGI 98077,JAPAN

来源：

ADVANCED MATERIALS | 1997年 / 9卷 / 04期

关键词：

D O I：

10.1002/adma.19970090417

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Research News: Langmuir-Blodgett (LB) films for high-resolution resists for the preparation of integrated circuits with higher densities are reviewed briefly A technique based on the polymerization of monomeric LB films and a newer one based on the two-dimensional cross-linking of a polymeric LB film are described. It is demonstrated that cross-linkable polymeric LB films have the ability to create high-resolution molecular patterning with nanometer (layer) thickness. Examples of patterns produced with such films are presented.

引用

页码：361 / &

页数：5

共 17 条

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