Resonance tracking ultrasonic atomic force microscopy

被引：18

作者：

Kobayashi, K ^{[1
]}

Yamada, H ^{[1
]}

Matsushige, K ^{[1
]}

机构：

[1] Kyoto Univ, Int Innovat Ctr, Kyoto 6068501, Japan

来源：

SURFACE AND INTERFACE ANALYSIS | 2002年 / 33卷 / 02期

关键词：

atomic force microscopy; ultrasonic atomic force microscopy; resonance tracking technique; frequency-modulated detection method; phase-change recording medium;

D O I：

10.1002/sia.1168

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We have developed a new resonance tracking ultrasonic atomic force microscopy (UAFM) technique that measures the contact resonance frequency of a cantilever beam. The cantilever beam is vibrated at its contact resonance frequency by applying positive feedback while the tip near the end of the beam is kept in contact with the sample surface. The topographic image is acquired in normal contact mode while the contact resonance frequency is tracked by an extremely sensitive phase-locked loop (PLL) circuit for the UAFM image. The UAFM image was obtained on a phase-change recording medium (rewritable compact disc). The image showed a variation in the contact resonance frequency as large as 150 Hz in the groove, which probably is caused by the difference in elastic properties between the crystalline phase and the amorphous phase. Copyright (C) 2002 John Wiley Sons, Ltd.

引用

页码：89 / 91

页数：3

共 11 条

[1] FREQUENCY-MODULATION DETECTION USING HIGH-Q CANTILEVERS FOR ENHANCED FORCE MICROSCOPE SENSITIVITY [J].