Scanning magnetoresistance microscopy with a magnetoresistive sensor cantilever

被引:26
作者
Nakamura, M [1 ]
Kimura, M [1 ]
Sueoka, K [1 ]
Mukasa, K [1 ]
机构
[1] Hokkaido Univ, Grad Sch Engn, Kita Ku, Sapporo, Hokkaido 0608628, Japan
关键词
D O I
10.1063/1.1469681
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this work, a cantilever with a magnetoresistive (MR) sensor is fabricated for scanning magnetoresistance microscope, in order to realize the simultaneous imaging of surface topography and stray magnetic field distribution. A constant current flowing through a meander-patterned metal wire produces a defined magnetic field, and the wire is used as a sample to demonstrate the simultaneous imaging and to reveal the field sensitivity of the cantilever. A MR image has been successfully obtained with lateral spatial resolution of a few mum and a field sensitivity (H(min)approximate to1.7 Oe) at room temperature. (C) 2002 American Institute of Physics.
引用
收藏
页码:2713 / 2715
页数:3
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