Laser Liftoff GaN Thin-Film Photonic Crystal GaN-Based Light-Emitting Diodes

被引:56
作者
Cho, Hyun Kyong [1 ]
Kim, Sun-Kyung [1 ]
Bae, Duk Kyu [1 ]
Kang, Bong-Cheol [1 ]
Lee, Jeong Soo [1 ]
Lee, Yong-Hee [2 ]
机构
[1] LG Elect Inst Technol, LED Res & Dev Lab, Seoul 137724, South Korea
[2] Korea Adv Inst Sci & Technol, Dept Phys, Taejon 305701, South Korea
关键词
GaN; laser liftoff (LLO); light-emitting diode (LED); photonic crystal (PhC);
D O I
10.1109/LPT.2008.2006506
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We fabricated a thin-film vertical-injection light-emitting diode (LED), which uses a highly efficient coherent external scattering of trapped light by photonic crystal (PhC). The PhC patterns (a = 1200 nm) were formed on top of the n-GaN surface after laser liftoff of the sapphire substrate. This light extraction structure just above micron scale was prepared by a conventional photolithography (A. = 405 nm). The Si-gel-encapsulated thin-film LED with PhC patterns (a = 1 200 nm), which had a depth of 500 urn, demonstrated up to 76% improvement in light output power at a forward current of 60 mA, compared with the nonpatterned thin film LED.
引用
收藏
页码:2096 / 2098
页数:3
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