P-channel tunnel field-effect transistors down to sub-50 nm channel lengths

被引:84
作者
Bhuwalka, KK [1 ]
Born, M [1 ]
Schindler, M [1 ]
Schmidt, M [1 ]
Sulima, T [1 ]
Eisele, I [1 ]
机构
[1] Univ Bundeswehr Munich, Fak Elekrotech & Informationstech, Inst Phys, D-85577 Neuherberg, Germany
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 4B期
关键词
band-to-band tunneling; kT/q independent; p-channel; subthreshold swing; surface tunnel transistor; tunnel FET; tunneling transistor; SiGe; SOI;
D O I
10.1143/JJAP.45.3106
中图分类号
O59 [应用物理学];
学科分类号
摘要
Experimental results of p-channel silicon vertical tunnel field-effect transistors down to sub-50 nm channel length are shown. As predicted by two-dimensional simulations, we show that the device on-current is nearly independent of channel length scaling. As the drain current is determined by electrons tunneling from the valence band to the conduction band, we show that mobility does not play any role in determining the device characteristics. Low temperature measurements reveal weak positive temperature coefficient in the transfer characteristics due to the dependence of bandgap on temperature. However, as expected for the silicon devices, low on-current is observed. Thus, we propose a lateral tunnel FET on SiGe-on-insulator with high on-currents and symmetric performance in n-channel as well as p-channel operating modes.
引用
收藏
页码:3106 / 3109
页数:4
相关论文
共 24 条
[1]   Band-to-band tunneling in carbon nanotube field-effect transistors [J].
Appenzeller, J ;
Lin, YM ;
Knoch, J ;
Avouris, P .
PHYSICAL REVIEW LETTERS, 2004, 93 (19) :196805-1
[2]   Lateral interband tunneling transistor in silicon-on-insulator [J].
Aydin, C ;
Zaslavsky, A ;
Luryi, S ;
Cristoloveanu, S ;
Mariolle, D ;
Fraboulet, D ;
Deleonibus, S .
APPLIED PHYSICS LETTERS, 2004, 84 (10) :1780-1782
[3]   PROPOSAL FOR SURFACE TUNNEL TRANSISTORS [J].
BABA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (4B) :L455-L457
[4]   Scaling the vertical tunnel FET with tunnel bandgap modulation and gate workfunction engineering [J].
Bhuwalka, KK ;
Schulze, J ;
Eisele, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2005, 52 (05) :909-917
[5]   A simulation approach to optimize the electrical parameters of a vertical tunnel FET [J].
Bhuwalka, KK ;
Schulze, J ;
Eisele, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2005, 52 (07) :1541-1547
[6]   Performance enhancement of vertical tunnel field-effect transistor with SiGe in the δp+ layer [J].
Bhuwalka, KK ;
Schulze, J ;
Eisele, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (7A) :4073-4078
[7]   Vertical tunnel field-effect transistor [J].
Bhuwalka, KK ;
Sedlmaier, S ;
Ludsteck, AK ;
Tolksdorf, A ;
Schulze, J ;
Eisele, I .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2004, 51 (02) :279-282
[8]  
BHUWALKA KK, 2005, INT C SOL STAT DEV M
[9]  
BHUWALKA KK, 2005, ULIS6 6 INT C ULT IN
[10]  
COLLINGE JP, 1991, SILICON INSULATOR TE