Lateral interband tunneling transistor in silicon-on-insulator

被引:107
作者
Aydin, C [1 ]
Zaslavsky, A
Luryi, S
Cristoloveanu, S
Mariolle, D
Fraboulet, D
Deleonibus, S
机构
[1] Brown Univ, Dept Phys, Providence, RI 02912 USA
[2] Brown Univ, Div Engn, Providence, RI 02912 USA
[3] SUNY Stony Brook, Dept Elect Engn, Stony Brook, NY 11794 USA
[4] IMEP ENSERG, Grenoble, France
[5] CEA, CEA DRT, LETI DTS, Grenoble, France
关键词
D O I
10.1063/1.1668321
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on a lateral interband tunneling transistor, where the source and drain form a heavily doped lateral pn junction in a thin Si film on a silicon-on-insulator (SOI) substrate. The transistor action results from the control of the reverse-bias tunneling breakdown under drain bias V-D by a gate voltage V-G. We observe gate control over tunneling drain current I-D at both polarities of V-G with negligible gate leakage. Systematic I-D(V-G,V-D) measurements, together with numerical device simulations, show that in first approximation I-D depends on the maximum junction electric field F-max(V-G,V-D). Excellent performance is hence predicted in devices with more abrupt junctions and thinner SOI films. The device does not have an inversion channel and is not subject to scaling rules of standard Si transistors. (C) 2004 American Institute of Physics.
引用
收藏
页码:1780 / 1782
页数:3
相关论文
共 26 条
[1]   PROPOSAL FOR SURFACE TUNNEL TRANSISTORS [J].
BABA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (4B) :L455-L457
[2]   Frontiers of silicon-on-insulator [J].
Celler, GK ;
Cristoloveanu, S .
JOURNAL OF APPLIED PHYSICS, 2003, 93 (09) :4955-4978
[3]  
CHOW WF, 1968, PRINCIPLES TUNNEL DI
[4]   Fabrication of self-aligned surface tunnel transistors with a 80-nm gate length [J].
Chun, YJ ;
Uemura, T ;
Baba, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 2000, 39 (12B) :L1273-L1276
[5]  
Doris B, 2002, INTERNATIONAL ELECTRON DEVICES 2002 MEETING, TECHNICAL DIGEST, P267, DOI 10.1109/IEDM.2002.1175829
[6]   Ultimately thin double-gate SOI MOSFETs [J].
Ernst, T ;
Cristoloveanu, S ;
Ghibaudo, G ;
Ouisse, T ;
Horiguchi, S ;
Ono, Y ;
Takahashi, Y ;
Murase, K .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2003, 50 (03) :830-838
[7]   NEW PHENOMENON IN NARROW GERMANIUM PARA-NORMAL-JUNCTIONS [J].
ESAKI, L .
PHYSICAL REVIEW, 1958, 109 (02) :603-604
[8]  
ESSENI D, 2002, FUTURE TRENDS MICROE, P63
[9]   Performance improvement in vertical surface tunneling transistors by a boron surface phase [J].
Hansch, W ;
Borthen, P ;
Schulze, J ;
Fink, C ;
Sulima, T ;
Eisele, I .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (5A) :3131-3136
[10]  
Kane E. O., 1969, Tunneling phenomena in solids, P79