Electrical properties of ZrO2 thin films

被引：49

作者：

Jonsson, AK ^{[1
]}

Niklasson, GA ^{[1
]}

Veszelei, M ^{[1
]}

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden

来源：

THIN SOLID FILMS | 2002年 / 402卷 / 1-2期

关键词：

conductivity; dielectric properties; zirconium;

D O I：

10.1016/S0040-6090(01)01715-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Electrical properties of sputtered ZrO2 thin films have been studied using impedance spectroscopy, isothermal transient ionic current and current-voltage measurements. ZrO2 have different dielectric properties when fresh, i.e. newly deposited, or aged. A fresh sample can arbitrarily show two different behaviors consisting of a d.c. conductivity with a relaxation peak superimposed on it. The d.c. conductivity shows either of two different values. The aged sample has a lower d.c. conductivity and the relaxation peak is found at much lower frequencies. Fresh samples of ZrO2, also show switching behavior which aged samples never do. Analyses of current-voltage characteristics indicate hopping as the main conduction process. (C) 2002 Elsevier Science B.V All rights reserved.

引用

页码：242 / 247

页数：6

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