The influence of high energy proton bombardment on the electrical and defect properties of single-crystal ZnO

被引:58
作者
Auret, FD [1 ]
Goodman, SA
Hayes, M
Legodi, MJ
van Laarhoven, HA
Look, DC
机构
[1] Univ Pretoria, Dept Phys, ZA-0002 Pretoria, South Africa
[2] Wright State Univ, Semicond Res Ctr, Dayton, OH 45435 USA
[3] USAF, Mat & Mfg Directorate, Wright Patterson AFB, OH 45433 USA
关键词
D O I
10.1088/0953-8984/13/40/315
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We report on the electrical and defect characterization of Au Schottky diodes formed on single-crystal ZnO, before and after irradiating with high-energy (1.8 MeV) protons. Prior to bombardment we observed that several electron traps (E1-E4), with energies between 0.10 and 0.57 eV below the conduction band, are present in the ZnO. High-energy proton bombardment introduces two electron traps (Ep1 and Ep2), with extremely low introduction rates (eta) of 2.4 and 1.9 cm(-1), respectively. Schottky barrier properties such as the reverse leakage current deteriorated from I x 10(-9) A for an unirradiated diode to 1 X 10(-6) A after bombarding it with a dose of 4.2 x 10(14) cm(-2) protons. Compared to GaN we found that ZnO is remarkably resistant to high-energy proton bombardment.
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页码:8989 / 8999
页数:11
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