Large-area achromatic interferometric lithography for 100 nm period gratings and grids

被引：159

作者：

Savas, TA

Schattenburg, ML

Carter, JM

Smith, HI

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1996年 / 14卷 / 06期

关键词：

D O I：

10.1116/1.588613

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Achromatic interferometric lithography is the preferred approach for producing large-area, spatially coherent 100 nm period gratings and grids. We report on improvements to processes which have enabled exposure areas of approximate to 10 cm(2). In addition, we report on the fabrication of 100 nm period free-standing gold gratings. (C) 1996 American Vacuum Society.

引用

页码：4167 / 4170

页数：4

共 19 条

[1] METROLOGY OF ELECTRON-BEAM LITHOGRAPHY SYSTEMS USING HOLOGRAPHICALLY PRODUCED REFERENCE SAMPLES
ANDERSON, EH
BOEGLI, V
SCHATTENBURG, ML
KERN, D
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3606 - 3611
[2] ARRAYS OF GATED FIELD-EMITTER CONES HAVING 0.32-MU-M TIP-TO-TIP SPACING
BOZLER, CO
HARRIS, CT
RABE, S
RATHMAN, DD
HOLLIS, MA
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 629 - 632
[3] STUDY OF NANOSCALE MAGNETIC-STRUCTURES FABRICATED USING ELECTRON-BEAM LITHOGRAPHY AND QUANTUM MAGNETIC DISK
CHOU, SY
WEI, M
KRAUSS, PR
FISCHER, PB
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3695 - 3698
[4] A NEW OPERATING REGIME FOR ELECTROPLATING THE GOLD ABSORBER ON X-RAY MASKS
DAUKSHER, WJ
RESNICK, DJ
JOHNSON, WA
YANOF, AW
[J]. MICROELECTRONIC ENGINEERING, 1994, 23 (1-4) : 235 - 238
[5] EFFECT OF BRIGHTENER CONCENTRATION ON THE THERMAL DISTORTION OF GOLD PLATED X-RAY MASKS
DAUKSHER, WJ
RESNICK, DJ
SEESE, PA
CUMMINGS, KD
YANOF, AW
JOHNSON, WA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3990 - 3994
[6] SPATIAL-PHASE-LOCKED ELECTRON-BEAM LITHOGRAPHY - INITIAL TEST-RESULTS
FERRERA, J
WONG, VV
RISHTON, S
BOEGLI, V
ANDERSON, EH
KERN, DP
SMITH, HI
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2342 - 2345
[7] DIFFRACTION OF ATOMS BY A TRANSMISSION GRATING
KEITH, DW
SCHATTENBURG, ML
SMITH, HI
PRITCHARD, DE
[J]. PHYSICAL REVIEW LETTERS, 1988, 61 (14) : 1580 - 1583
[8] FABRICATION OF SINGLE-DOMAIN MAGNETIC PILLAR ARRAY OF 35 NM DIAMETER AND 65 GBITS/IN(2) DENSITY
KRAUSS, PR
FISCHER, PB
CHOU, SY
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3639 - 3642
[9] KUNZ RR, 1994, P SOC PHOTO-OPT INS, V2195, P447, DOI 10.1117/12.175358
[10] SUBMICRON PATTERNING OF THIN COBALT FILMS FOR MAGNETIC STORAGE
NEW, RMH
PEASE, RFW
WHITE, RL
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3196 - 3201

← 1 2 →