Passivation of Zn3P2 substrates by aqueous chemical etching and air oxidation

被引:14
作者
Kimball, Gregory M.
Bosco, Jeffrey P.
Mueller, Astrid M.
Tajdar, Syed F.
Brunschwig, Bruce S.
Atwater, Harry A. [1 ]
Lewis, Nathan S.
机构
[1] CALTECH, Noyes Lab, Watson Lab, Pasadena, CA 91125 USA
关键词
PHOSPHIDE; CRYSTALS;
D O I
10.1063/1.4765030
中图分类号
O59 [应用物理学];
学科分类号
摘要
Surface recombination velocities measured by time-resolved photoluminescence and compositions of Zn3P2 surfaces measured by x-ray photoelectron spectroscopy (XPS) have been correlated for a series of wet chemical etches of Zn3P2 substrates. Zn3P2 substrates that were etched with Br-2 in methanol exhibited surface recombination velocity values of 2.8 x 10(4) cm s(-1), whereas substrates that were further treated by aqueous HF-H2O2 exhibited surface recombination velocity values of 1.0 x 10(4) cm s(-1). Zn3P2 substrates that were etched with Br-2 in methanol and exposed to air for 1 week exhibited surface recombination velocity values of 1.8 x 10(3) cm s(-1), as well as improved ideality in metal/insulator/semiconductor devices. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4765030]
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页数:3
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