Anisotropic etching of SiC whiskers

被引:90
作者
Cambaz, GZ
Yushin, GN
Gogotsi, Y
Lutsenko, VG
机构
[1] Drexel Univ, Dept Mat Sci & Engn, Philadelphia, PA 19104 USA
[2] Natl Acad Sci Ukraine, VI Vernadski Inst Gen & Inorgan Chem, UA-03680 Kiev 142, Ukraine
关键词
D O I
10.1021/nl051858v
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We have demonstrated a method of producing nanoplatelets or complex well-ordered nanostructures from silicon carbide (SiC) whiskers. Preferential etching of SiC whiskers in a mixture of hydrofluoric and nitric acids (3:1 ratio) at 100 degrees C results in the selective removal of cubic SiC and the formation of complex structures resembling a pagoda architecture. Possible mechanisms governing selective etching are discussed. Reproducible results on SiC whiskers manufactured in different laboratories suggest that the self-patterning phenomena are common in SiC whiskers, and the same electroless etching procedure can be used to synthesize various complex nanostructures from more conventional nano- and microscale objects for use as building blocks in the fabrication of sensors, cellular probes, and electronic, optoelectronic, electromechanical, and other devices.
引用
收藏
页码:548 / 551
页数:4
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