Strain-induced channel waveguiding in bulk sapphire substrates

被引:9
作者
Liu, MJ [1 ]
Kim, HK [1 ]
机构
[1] Univ Pittsburgh, Dept Elect Engn, Pittsburgh, PA 15261 USA
关键词
D O I
10.1063/1.1413221
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the two-dimensional confinement of light in the channel region of a bulk sapphire substrate, which was formed by utilizing the photoelastic effect in sapphire induced by a sputter-deposited SiO2 film. The experimental result, combined with the simulation results, shows that the sputter-deposited SiO2 films are compressively stressed up to 10 GPa level and that a 1.0-mum-thick film, for example, induces an index change of 5x10(-3) in sapphire in the vertical direction. This amount of index change is found sufficient to support a fundamental mode at wavelengths of 1.54 mum or below. (C) 2001 American Institute of Physics.
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页码:2693 / 2695
页数:3
相关论文
共 12 条
[11]   RF SPUTTERED EPITAXIAL ZNO FILMS ON SAPPHIRE FOR INTEGRATED-OPTICS [J].
PARADIS, EL ;
SHUSKUS, AJ .
THIN SOLID FILMS, 1976, 38 (02) :131-141
[12]   GAN, AIN, AND INN - A REVIEW [J].
STRITE, S ;
MORKOC, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (04) :1237-1266