A cylindrical micro-ultrasonic motor using micromachined bulk piezoelectric vibrator with glass case

被引：22

作者：

Kanda, Takefumi ^{[1
]}

Makino, Akira ^{[1
]}

Oomori, Yoshita ^{[1
]}

Suzumori, Koichi ^{[1
]}

机构：

[1] Okayama Univ, Grad Sch Nat Sci & Technol, Okayama 7008530, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2006年 / 45卷 / 5B期

关键词：

micromotor; ultrasonic motor; piezoelectric vibrator; bulk piezoelectric material; PZT; cylindrical vibrator;

D O I：

10.1143/JJAP.45.4764

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A cylindrical piezoelectric vibrator 0.8 mm in diameter was fabricated by micromachining. In this paper, a micro ultrasonic motor 1.8 mm in casing diameter that uses this micro-machined cylindrical bulk piezoelectric vibrator is introduced. This motor consists of the piezoelectric vibrator, a glass case, a bearing, and a rotor. The vibration velocity of the cylindrical vibrator was 715 mm/s when the driving frequency was 69 kHz and the driving voltage was 40 Vp-p. Since the stator transducer is fixed at the end of the cylinder, it is easy to support the vibrator, and the motor has a simple structure. In addition, the vibrator and rotor were supported by glass case. As the case was made of glass, a suitable vibration mode of the driving of the motor was obtained. We have fabricated and evaluated the cylindrically shaped traveling micro-ultrasonic motor using this vibrator.

引用

页码：4764 / 4769

页数：6

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