学术探索
学术期刊
新闻热点
数据分析
智能评审

A micro ultrasonic motor using a micro-machined cylindrical bulk PZT transducer

被引：113
作者：
Kanda, T
Makino, A
Ono, T
Suzumori, K
Morita, T
Kurosawa, MK
机构：
[1] Okayama Univ, Grad Sch Nat Sci & Technol, Okayama 7008530, Japan
[2] Univ Tokyo, Grad Sch Frontier Sci, Bunkyo Ku, Tokyo 1130033, Japan
[3] Tokyo Inst Technol, Interdisciplinary Grad Sch Sci & Engn, Midori Ku, Yokohama, Kanagawa 2268502, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2006年 / 127卷 / 01期
关键词：
piezoelectric actuator; ultrasonic motor; micro motor; bulk piezoelectric material; micro machining;
D O I：
10.1016/j.sna.2005.10.056
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and a height of 5.9 mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码：131 / 138
页数：8
相关论文
共 10 条
[1]   A piezoelectric micromotor with a stator of φ=1.6 mm and l=4 mm using bulk PZT [J].
Cagatay, S ;
Koc, B ;
Moses, P ;
Uchino, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (4A) :1429-1433
[2]   Piezoelectric ultrasonic micromotor with 1.5 mm diameter [J].
Dong, SX ;
Lim, SP ;
Lee, KH ;
Zhang, JD ;
Lim, LC ;
Uchino, K .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (04) :361-367
[3]  
KANDA T, 2003, P 5 WORLD C ULTR, P833
[4]   A piezoelectric motor using two orthogonal bending modes of a hollow cylinder [J].
Koc, B ;
Cagatay, S ;
Uchino, K .
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2002, 49 (04) :495-500
[5]  
LINO A, 2000, ULTRASONICS, V38, P54
[6]   Miniature piezoelectric motors [J].
Morita, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2003, 103 (03) :291-300
[7]   A cylindrical shaped micro ultrasonic motor utilizing PZT thin film (1.4 mm in diameter and 5.0 mm long stator transducer) [J].
Morita, T ;
Kurosawa, MK ;
Higuchi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :225-230
[8]   An ultrasonic micromotor using a bending cylindrical transducer based on PZT thin film [J].
Morita, T ;
Kurosawa, M ;
Higuchi, T .
SENSORS AND ACTUATORS A-PHYSICAL, 1995, 50 (1-2) :75-80
[9]  
Morita T., 1999, JPN J APPL PHYS, V38, P3327
[10]   Development of a new type piezoelectric micromotor [J].
Suzuki, Y ;
Tani, K ;
Sakuhara, T .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 83 (1-3) :244-248
1