Morphological control of laser-synthesized silicon nanoparticles

被引：9

作者：

Hirasawa, M ^{[1
]}

Seto, T ^{[1
]}

Aya, N ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Res Ctr Adv Mfg Nanoscale Sci & Engn, Tsukuba, Ibaraki 3058564, Japan

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2001年 / 1卷 / 04期

关键词：

in situ annealing; laser ablation; silicon nanoparticles; size selection;

D O I：

10.1166/jnn.2001.057

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Size and crystallinity controlled silicon nanoparticles were prepared by a laser ablation, in situ annealing and mobility size-selection with a differential mobility analyzer (DMA). The shape and crystal structure of generated particles were observed by a transmission electron microscopy (TEM). Both densification of agglomerates and crystal growth of the particles were observed. The size of silicon primary particle was increased by the annealing, and the uniformity of the particle classified at 10 nm was improved as a result.

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页码：381 / 383

页数：3

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