Effect of surface quality on overgrowth of highly strained GaInAs/GaAs quantum wells and improvement by a strained buffer layer

被引:27
作者
Schlenker, D [1 ]
Pan, Z [1 ]
Miyamoto, T [1 ]
Koyama, F [1 ]
Iga, K [1 ]
机构
[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 9A期
关键词
strain; surface quality; threading dislocation; island growth; AFM; MOCVD; quantum well;
D O I
10.1143/JJAP.38.5023
中图分类号
O59 [应用物理学];
学科分类号
摘要
The introduction of a thin strained GaInAs buffer layer is proposed in the metalorganic chemical vapor phase deposition of GaInAs/GaAs quantum wells for greater than or equal to 1.2 mu m wavelength emission. This buffer layer is found to be very effective in improving the surface quality on which highly mismatched GaInAs quantum wells with an indium content around 40% are grown. Atomic force microscopy measurements demonstrate that the insertion of this strained GaInAs buffer layer can reduce the density of three dimensional islands in a highly strained GaInAs layer by one order of magnitude. We show that highly strained GaInAs/GaAs quantum wells with an indium content around 40% are more sensitive to surface quality than in the case of a lower indium content. This technique has enabled us to achieve a high-quality GaInAs/GaAs quantum well laser emitting at a wavelength near 1.2 mu m.
引用
收藏
页码:5023 / 5027
页数:5
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