Laser-assisted growth of molybdenum rods

被引:6
作者
Björklund, KL [1 ]
Heszler, P [1 ]
Boman, M [1 ]
机构
[1] Uppsala Univ, Dept Chem Mat, Angstrom Lab, SE-75121 Uppsala, Sweden
基金
瑞典研究理事会;
关键词
laser-assisted CVD; molybdenum rods; MEMS;
D O I
10.1016/S0169-4332(01)00619-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
In this paper, we report for the first time the laser-assisted growth of molybdenum rods via the H-2 reduction of MoF6 with a focused Ar+ laser beam as the heat source. By varying the gas composition, total pressure, and laser power rods with different morphologies were deposited on a tungsten wire. At low H-2/MoF6 molar ratios crystal-like rods were obtained and at higher molar ratios the rods became dendrite-like. The activation energy for the process was determined to be 77 +/- 7 kJ mol(-1) in the temperature range 705-840 K. The reaction order showed to be nearly 3 with respect to the hydrogen partial pressure and zero order with respect to the molybdenum hexafluoride partial pressure. Compositional and morphological characterisation were performed with scanning electron microscopy, energy dispersed X-ray spectroscopy and Auger electron spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:179 / 183
页数:5
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