A new diode-based carbon monoxide gas sensor utilizing Pt-SnOx/diamond

被引：22

作者：

Gurbuz, Y ^{[1
]}

Kang, WP ^{[1
]}

Davidson, JL ^{[1
]}

Kerns, DV ^{[1
]}

机构：

[1] Vanderbilt Univ, Dept Elect & Comp Engn, Nashville, TN 37235 USA

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1999年 / 56卷 / 1-2期

关键词：

PECVD diamond; diode; CO; sensor;

D O I：

10.1016/S0925-4005(99)00175-6

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A high temperature tolerant microelectronic-based carbon monoxide (CO) gas Sensor has been developed. The device is fabricated as a diamond diode with Pt-SnOx as the CO gas sensitive electrode. The gas sensing performance has been studied over a wide temperature range (50-500 degrees C). The gas sensitivity of the sensor is large, fast, repeatable, and reproducible. The CO detection mechanism of the sensor was studied and attributed to the reduction of oxygen in the SnOx by CO gas, thereby increasing the oxygen vacancies in the SnOx layer of the sensor upon exposure to CO gas. Activation energy of the sensor was analyzed and found to be 1.1 kcal/mol in 1.4-Torr CO gas with 0.6-Torr oxygen as background gas. The low value of activation energy confirms the fast response and large sensitivity of the sensor for CO gas. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：151 / 154

页数：4

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