GaN-based stacked micro-optics system

被引：2

作者：

Hou, CH ^{[1
]}

Chen, CC

Pong, BJ

Li, MH

Chi, GC

Chen, NC

Shih, CF

Chang, PH

机构：

[1] Natl Cent Univ, Inst Opt Sci, Jhongli 320, Taiwan

[2] Natl Cent Univ, Dept Phys, Jhongli 320, Taiwan

[3] Chang Gung Univ, Dept Elect Engn, Inst Electroopt Engn, Tao Yuan, Taiwan

来源：

APPLIED OPTICS | 2006年 / 45卷 / 11期

关键词：

D O I：

10.1364/AO.45.002396

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A prototype of a GaN-based stacked micro-optics system is demonstrated. The system consists of a GaN microlens, GaN membrane gratings, six spacers, a spatial filter, and a 980 nm VCSEL. The laser beam is collimated by the GaN microlens and diffracted by the GaN membrane grating. The systems can be used in blue-violet-UV micro-optics systems. (c) 2006 Optical Society of America.

引用

收藏

页码：2396 / 2398

页数：3

相关论文

共 17 条

[1] Realization of free-space optical pickup head with stacked Si-based phase elements [J].

Chang, JY ;

Wang, CM ;

Lee, CC ;

Shih, HF ;

Wu, ML .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2005, 17 (01) :214-216

[2] Gratings in GaN membranes [J].

Chen, CC ;

Hou, CH ;

Sheu, JK ;

Chang, JY ;

Li, MH ;

Chi, GC ;

Wu, C .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (8B) :5854-5856

[3]

Chen CC, 1997, IEEE PHOTONIC TECH L, V9, P1361

[4] GaN diffractive microlenses fabricated with gray-level mask [J].

Chen, CC ;

Li, MH ;

Chang, CY ;

Sheu, JK ;

Chi, GC ;

Cheng, WT ;

Yeh, JH ;

Chang, JY ;

Ito, T .

OPTICS COMMUNICATIONS, 2003, 215 (1-3) :75-78

[5] Design of GaN convex diffractive microlenses [J].

Chen, CC ;

Chang, JY ;

Chi, GC .

OPTICS AND LASER TECHNOLOGY, 2002, 34 (07) :569-573

[6] Effects of In and Ga interdiffusion on the optical gain of InGaN/GaN quantum well [J].

Chen, CC ;

Hsueh, TH ;

Ting, YS ;

Chi, GC ;

Chang, CA .

JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5180-5182

[7] Crystal orientation dependence of optical gain in InGaN/GaN multiple-quantum-well structures [J].

Chen, CC ;

Hsieh, KL ;

Sheu, JK ;

Chi, GC ;

Jou, MJ ;

Lee, CH ;

Lin, MZ .

APPLIED PHYSICS LETTERS, 2001, 79 (10) :1477-1479

[8] Effect of thermal annealing on high indium content InGaN/GaN single quantum well structures [J].

Chen, CC ;

Hsieh, KL ;

Chi, GC ;

Chuo, CC ;

Chyi, JI ;

Chang, CA .

JOURNAL OF APPLIED PHYSICS, 2001, 89 (10) :5465-5468

[9] Stimulated-emission spectra of high-indium-content InGaN/GaN multiple-quantum-well structures [J].

Chen, CC ;

Chuang, HW ;

Chi, GC ;

Chuo, CC ;

Chyi, JI .

APPLIED PHYSICS LETTERS, 2000, 77 (23) :3758-3760

[10] Mushroom microlenses: Optimized microlenses by reflow of multiple layers of photoresist [J].

Heremans, P ;

Genoe, J ;

Kuijk, M ;

Vounckx, R ;

Borghs, G .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1997, 9 (10) :1367-1369