GaN-based stacked micro-optics system

被引:2
作者
Hou, CH [1 ]
Chen, CC
Pong, BJ
Li, MH
Chi, GC
Chen, NC
Shih, CF
Chang, PH
机构
[1] Natl Cent Univ, Inst Opt Sci, Jhongli 320, Taiwan
[2] Natl Cent Univ, Dept Phys, Jhongli 320, Taiwan
[3] Chang Gung Univ, Dept Elect Engn, Inst Electroopt Engn, Tao Yuan, Taiwan
关键词
D O I
10.1364/AO.45.002396
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A prototype of a GaN-based stacked micro-optics system is demonstrated. The system consists of a GaN microlens, GaN membrane gratings, six spacers, a spatial filter, and a 980 nm VCSEL. The laser beam is collimated by the GaN microlens and diffracted by the GaN membrane grating. The systems can be used in blue-violet-UV micro-optics systems. (c) 2006 Optical Society of America.
引用
收藏
页码:2396 / 2398
页数:3
相关论文
共 17 条
[11]   Gallium nitride diffractive microlenses using in ultraviolet micro-optics system [J].
Hou, CH ;
Li, MH ;
Chen, CC ;
Chang, JY ;
Sheu, JK ;
Chi, GC ;
Wu, C ;
Cheng, WT ;
Yeh, JH .
OPTICAL REVIEW, 2003, 10 (04) :287-289
[12]   DISTRIBUTED-INDEX PLANAR MICROLENS AND STACKED PLANAR OPTICS - A REVIEW OF PROGRESS [J].
IGA, K ;
MISAWA, S .
APPLIED OPTICS, 1986, 25 (19) :3388-3396
[13]   Silicon-based transmissive diffractive optical element [J].
Lee, CC ;
Chang, YC ;
Wang, CM ;
Chang, JY ;
Chi, GC .
OPTICS LETTERS, 2003, 28 (14) :1260-1262
[14]   FABRICATION OF REFRACTIVE MICROLENS ARRAYS BY EXCIMER-LASER ABLATION OF AMORPHOUS TEFLON [J].
MIHAILOV, S ;
LAZARE, S .
APPLIED OPTICS, 1993, 32 (31) :6211-6218
[15]   Microlens systems for fluorescence detection in chemical microsystems [J].
Roulet, JC ;
Völkel, R ;
Herzig, HP ;
Verpoorte, E ;
de Rooij, NF ;
Dändliker, R .
OPTICAL ENGINEERING, 2001, 40 (05) :814-821
[16]   Design considerations of stacked multilayers of diffractive optical elements for optical network units in optical subscriber-network applications [J].
Sasaki, H ;
Fukuzaki, I ;
Katsuki, Y ;
Kamijoh, T .
APPLIED OPTICS, 1998, 37 (17) :3735-3745
[17]   Surface-micromachined 2-D optical scanners with high-performance single-crystalline silicon micromirrors [J].
Su, GDJ ;
Toshiyoshi, H ;
Wu, MC .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2001, 13 (06) :606-608